Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Lavinia Motta"'
Autor:
Lavinia Motta, Parikshit Sharma, Andrea Corno, Annalisa Bordogna, Paolo Piacentini, Paolo Parisi, Francesco Ferrario, Giovanna Pistone, Thomas Groos, Bernardo Micali, Alberto Beccalli, Simona Seminato, Loemba Bouckou
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXIV.
Appropriate solutions for post-lithographic defect management and process tool control are fundamental to ensure better chip quality and yield maintenance through the reduction of wafers at risk. The increasing demand in terms of wafer production cap
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::493aa214b8f717d63b942d0d4262b5ad
https://doi.org/10.1117/12.2551890
https://doi.org/10.1117/12.2551890
Publikováno v:
Progress in Organic Coatings. 136:105260
Hydrophobic polymers applied on hydroxylated surfaces increase their durability against undesired weathering processes. The achievement of a certain degree of surface hydrophobicity (reducing the water permeation) constitutes one of the main research
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::01256a398c0ff2a35ebc6a18f4ed315a
https://doi.org/10.1016/j.porgcoat.2019.105260
https://doi.org/10.1016/j.porgcoat.2019.105260