Electrical and Optical Characterization of SAW Sensors Coated with Parylene C and Their Analysis Using the Coupling-of-Modes (COM) Theory

Autor: Nikolay Smagin, Meddy Vanotti, Marc Duquennoy, Lionel Rousseau, Hassan Alhousseini, Virginie Blondeau-Patissier, Mohammadi Ouaftouh, Laurie Valbin, Etienne Herth

Publikováno v: Sensors, Vol 22, Iss 22, p 8611 (2022)

In this paper, we present how complementary characterization techniques, such as electrical measurements with a vector network analyzer (VNA), optical measurements with a laser Doppler vibrometer (LDV), and numerical simulations with the finite eleme

Externí odkaz: https://doaj.org/article/f73f33b6821f49c4be029de8499ee679

Modeling and detecting response of micromachining square and circular membranes transducers based on AlN thin film piezoelectric layer

Autor: Emmanuelle Algre, Laurie Valbin, Franck Lardet-Vieudrin, Etienne Herth

Publikováno v: Microsystem Technologies
Microsystem Technologies, Springer Verlag, 2017, 23 (9), pp.3873-3880. ⟨10.1007/s00542-015-2727-9⟩

Vibration analysis of square and circular piezoelectric micro ultrasonic transducers (pMUTs) in the 100 kHz range as a function of experimental tools are reported. Analytical and 3D finite element method analysis using Comsol software has been perfor

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bcd2d1b02287b2c38f91695de449601a
https://hal.archives-ouvertes.fr/hal-01771659

Mechanical behavior of T-shaped A1N membrane based on thin film elongation acoustic resonator

Autor: Etienne Herth, Gaelle Lissorgues, Laurie Valbin, Franck Lardet-Vieudrin

Publikováno v: 2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
2016 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), May 2016, Budapest, Hungary. pp.1-4, ⟨10.1109/DTIP.2016.7514867⟩

Microelectromechanical systems (MEMS) move rapidly towards commercialization, the issue of mechanical characterization has emerged as a major consideration in device design and fabrication. This paper investigates the vibration analysis of T shaped m

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::526c9f175b812e10475b86f0c76a7698
https://hal.archives-ouvertes.fr/hal-02439747

Capteurs MEMS - Techniques de mesures

Autor: Laure Sevely, Gilles Amendola, Laurie Valbin, Patrick Poulichet

Publikováno v: Instrumentation et méthodes de mesure.

Apres avoir expose dans le premier article (article [R 430]) les technologies de fabrication, les principaux effets rencontres et les traitements electroniques associes, le but de ce 2 e article est d’exposer les techniques utilisees et leur realis

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::428a55c3acfae51aab1ddee1d71274e7
https://doi.org/10.51257/a-v1-r431

Continuous Intra Ocular Pressure Measurement Sensor for Glaucoma Diagnostic

Autor: Patrick Poulichet, Laurie Valbin, Lionel Rousseau, Serge Picaud, Laurent Chicaud, Serge Bernard, Francois Dedieuleveult, Gaelle Lissorgues, Philippe Auvray, Philippe Bergonzo

Publikováno v: 6th World Congress of Biomechanics (WCB)
6th World Congress of Biomechanics (WCB), Aug 2010, Singapore, Singapore. pp.1282-1285, ⟨10.1007/978-3-642-14515-5_325⟩
IFMBE Proceedings ISBN: 9783642145148

International audience; Glaucoma is an ocular pathology usually associated with an increase in Intra Ocular Pressure (IOP). In this study, we are developing disposable eye lenses including a specific micro fabricated pressure sensor to measure IOP al

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cf250e1584a2ff554f7172aa956ee0fe
https://hal-lirmm.ccsd.cnrs.fr/lirmm-00808458