Výsledky vyhledávání - "Laurens F Kwakman"

Surface contamination and electrical damage by focused ion beam: conditions applicable to the extraction of TEM lamellae from nanoelectronic devices

Autor: Chris Drijbooms, Laurens F Kwakman, Alexis Franquet, Hugo Bender, Wilfried Vandervorst, Trudo Clarysse, Brigitte Parmentier

Publikováno v: Semiconductor Science and Technology. 30:114015

Focused ion beams (FIBs) are widely applied during manufacturing and for failure analysis, as a preparation tool for cross sectional scanning electron microscopy or for the extraction of lamellae for (scanning) transmission electron microscopy invest

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::cbc209bcae8c68244d6d2eebc365e9cd
https://doi.org/10.1088/0268-1242/30/11/114015

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