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pro vyhledávání: '"Lauren Portnow"'
Autor:
Pamela M. Visintin, Stephen P. Beaudoin, Ruben G. Carbonell, Cynthia K. Schauer, Sean Eichenlaub, Joseph M. DeSimone, Lauren Portnow
Publikováno v:
Journal of The Electrochemical Society. 153:G1064
The microelectronics industry has an interest in implementing condensed-CO 2 -based processes in many segments of the integrated-circuit manufacturing process. Preliminary studies of the behavior of copper surfaces and functionalized nanoparticles we
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a988f9493c61ed1c5a433466585db0a3
https://doi.org/10.1149/1.2358085
https://doi.org/10.1149/1.2358085
