Výsledky vyhledávání - "Lauren M. Jacobson"

Application of Fluorescence Correlation Spectroscopy in the Characterization of Particle Size Distributions of Colloidal Silica Abrasives Used in Chemical-Mechanical Planarization

Autor: Ashwani K. Rawat, Mansour Moinpour, Abhinav Tripahi, Daniel K. Turner, Lauren M. Jacobson, Colin T. Carver, Edward E. Remsen

Publikováno v: ECS Meeting Abstracts. :1435-1435

Recent studies have demonstrated that fluorescence correlation spectroscopy (FCS) can be used to analyze the adsorption of dissolved chemical compounds onto the dispersed abrasive particles in a CMP slurry (1, 2). The technique exploits competitive a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::044b6730e18aa492738f7681b68fe7b0
https://doi.org/10.1149/ma2014-01/38/1435

Zobrazit plný text záznamu

Vyhledávací nástroje:

Upřesnit hledání