Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Laurel L. Grotzinger"'
Autor:
Laurel L. Grotzinger, Susan D. Thai, Carol A. Bessel, Dorothy W. Skaf, Ginger M. Denison, Walter J. Boyko, Andrew Dunbar, Donna M. Omiatek, Christopher E. Kendrex, Randy D. Weinstein, Joseph M. DeSimone
Publikováno v:
Industrial & Engineering Chemistry Research. 45:8779-8787
Chemical−mechanical planarization (CMP) is a process of oxidizing and chelating the copper overburden present in an interconnect device while mechanically polishing the surface of the wafer. Because the use of condensed CO2 as the solvent for CMP w
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5f32321259bf8edb0860a4dd82db202f
https://doi.org/10.1021/ie060947v
https://doi.org/10.1021/ie060947v
Publikováno v:
Journal of Chemical & Engineering Data. 50:2088-2093
The solubility of lithium diethyldithiocarbamate, lithium dipropyldithiocarbamate, lithium dibutyldithiocarbamate, and lithium bis(trifluoroethyl)dithiocarbamate was measured in liquid and supercritical carbon dioxide at (298, 308, and 318) K and at
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b0889ad5d93d4190defb7e9cec85cd24
https://doi.org/10.1021/je0502952
https://doi.org/10.1021/je0502952
Autor:
Dain, Phyllis
Publikováno v:
Notable American Women, The Modern Period: A Biographical Dictionary (Vol.4); 1980, p503-504, 2p