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Autor:
Christophe Licitra, N. Coudurier, Denis Mariolle, Flore Boyer, Nicolas Chevalier, Laura Toseli, Philippe Rodriguez, Bernard Pelissier
Publikováno v:
ECS Transactions. 92:73-83
Obtaining a competitive III-V laser made with a CMOS-compatible process is a major issue in the framework of Silicon photonics. The choice of the material used to elaborate an ohmic contact for III-V substrate is quite limited and fabrication process