Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Laura Mohr-Weidenfeller"'
Autor:
Laura Mohr-Weidenfeller, Martin Hofmann, Oliver Birli, Annika-Verena Häcker, Carsten Reinhardt, Eberhard Manske
Publikováno v:
tm - Technisches Messen. 89:507-514
The extension of nanopositioning and nanomeasuring machines (NPM-machines) to fabrication machines by using a femtosecond laser for the implementation of direct laser writing by means of two-photon absorption (2PA) is a promising approach for cross-s
Autor:
Laura Mohr-Weidenfeller, Carsten Reinhardt, Eberhard Manske, Martin Hofmann, Oliver Birli, Annika-Verena Häcker
Publikováno v:
tm - Technisches Messen. 88:s22-s27
Zusammenfassung Die Erweiterung von Nanopositionier- und Nanomessmaschinen (NPM-Maschinen) zu Fabrikationsmaschinen durch den Einsatz eines Femtosekundenlasers für die Umsetzung von direktem Laserschreiben mittels Zwei-Photonen-Absorption (2PA) ist
Autor:
Oliver Dannberg, Andreas Meister, Stephan Gorges, Tino Hausotte, Xinrui Cao, Taras Sasiuk, Ivo W. Rangelow, Johannes Kirchner, Johann Reger, Laura Mohr-Weidenfeller, Christoph Reuter, Stefan Sinzinger, Lena Zentner, Steffen Strehle, Roland Füßl, Eberhard Manske, Jaqueline Stauffenberg, Martin Hofmann, David Fischer, Ralf Schienbein, René Theska, Carsten Reinhardt, Shraddha Supreeti, Florian Fern, Thomas Fröhlich, Christoph Weise, Christoph Dr. Schäffel, Jens-Peter Zöllner, Ingo Ortlepp
Publikováno v:
Nanomanufacturing and Metrology. 4:132-148
The field of optical lithography is subject to intense research and has gained enormous improvement. However, the effort necessary for creating structures at the size of 20 nm and below is considerable using conventional technologies. This effort and
Publikováno v:
Nanomanufacturing and Metrology. 4:149-155
Since the first realization of two-photon direct laser writing (DLW) in Maruo et al. (Opt Lett 22:132–134, 1997), the manufacturing using direct laser writing techniques spread out in many laboratories all over the world. Photosensitive materials w
Autor:
Annika-Verena Häcker, Laura Mohr-Weidenfeller, Clara F. L. Stolzenberg, Carsten Reinhardt, Eberhard Manske
Publikováno v:
Laser-based Micro- and Nanoprocessing XVI.
Autor:
Laura Mohr-Weidenfeller, Cathleen Kleinholz, Björn Müller, Sebastian Gropp, Sarah Günther-Müller, Michael Fischer, Jens Müller, Steffen Strehle
Publikováno v:
Journal of Micromechanics and Microengineering. 32:105004
Thermal bonding of silicon and low-temperature cofired ceramics (LTCC) at sintering temperatures of 900 °C represents currently the standard process in silicon-ceramic composite (SiCer) substrate fabrication. We analyse the thermal behavior of the L