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pro vyhledávání: '"Lasisch, Ellena"'
Autor:
Riss, Alexander, Lasisch, Ellena, Podbelsek, Simon, Schäfer, Katharina, Parzer, Michael, Garmroudi, Fabian, Eisenmenger-Sittner, Christoph, Mori, Takao, Bauer, Ernst
Magnetron sputtering inherently exhibits the advantage of dislodging particles from the target in a ratio equivalent to the target stoichiometry. Nevertheless, film compositions often deviate due to element-dependent scattering with the working gas,
Externí odkaz:
http://arxiv.org/abs/2406.04729
