Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Larry W. Austin"'
Autor:
Harold G. Linde, Larry W. Austin
Publikováno v:
Sensors and Actuators A: Physical. 49:167-172
Heterocyclic amine catalysts used to accelerate the wet oxidation of 〈100〉 silicon in gallate-complexed aqueous amine etchant formulations include pyrazines, pyridazines, and N -conjugated triazoles, tetrazoles, and triazines. Faster oxidation re
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2771b1ca6e5cd0d4d680944360fbdb9e
https://doi.org/10.1016/0924-4247(95)01031-9
https://doi.org/10.1016/0924-4247(95)01031-9
Autor:
Larry W. Austin, Harold G. Linde
Publikováno v:
Sensors and Actuators A: Physical. 49:181-185
A wide variety of oxidative catalysts have been tested in altering the wet chemical etching of the three major crystal faces of silicon, using a solution of gallic acid—ethanolamine—water. Significant variations in etch selectivity occur, where b
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f3bff27713a39ca9575a7c6ec5387ab
https://doi.org/10.1016/0924-4247(95)01019-x
https://doi.org/10.1016/0924-4247(95)01019-x