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pro vyhledávání: '"Larry Pulvirent"'
Autor:
Rajan Nagabushnam, Scott C. Bolton, Paul G. Y. Tsui, Ted R. White, H. Chuang, Dave Kolar, Larry Pulvirent, Larry E. Frisa, Mohamed Jahanbani, Jeff Cope
Publikováno v:
SPIE Proceedings.
This work compares the extendibility of titanium with pre- deposition amorphizing implant (PAI) and cobalt salicides to sub-0.25 micrometer technologies. Cobalt salicide has low sheet resistance and a tighter distribution of sheet resistances than ti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::abc1466cd70d332ab1072cea52065f53
https://doi.org/10.1117/12.323957
https://doi.org/10.1117/12.323957
