Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Lang-Yu Huang"'
Publikováno v:
International Symposium for Testing and Failure Analysis.
It is well known that pursuing the miniaturization of devices to lower the cost and increase high-speed performance are extremely important goals for dynamic random access memory (DRAM). Therefore, electron tomography has a high potential for applica
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c25beb418f6e18a9f0c1aaa28586cf42
https://doi.org/10.31399/asm.cp.istfa2007p0115
https://doi.org/10.31399/asm.cp.istfa2007p0115
Publikováno v:
International Symposium for Testing and Failure Analysis.
The capabilities of analytical transmission electron microscopy (TEM), such as high spatial resolution, micro-chemical analysis, etc., have led to an increasingly essential role for TEM-based analysis in process development, defect identification, yi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::856492c10aaf0e7e7758150becb52182
https://doi.org/10.31399/asm.cp.istfa2006p0196
https://doi.org/10.31399/asm.cp.istfa2006p0196
Publikováno v:
International Symposium for Testing and Failure Analysis.
This paper demonstrates a novel method of XTEM sample preparation for site-specific surface defect analysis using backside polishing. Analysis of three different types of site-specific surface defects was demonstrated using a novel backside XTEM samp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b714c6cfc897a3b27db19584475a148
https://doi.org/10.31399/asm.cp.istfa2006p0188
https://doi.org/10.31399/asm.cp.istfa2006p0188