Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Lance H. Oh"'
Autor:
Stephan R. McCandliss, Kyowon Kim, Alexander Kutyrev, Mathew Greenhouse, Samuel H. Moseley, Lance H. Oh, Regis P. Brekosky, Mary J. Li
Publikováno v:
UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXI.
Autor:
Lance H. Oh, Nick Costen, Dan Kelly, Mary J. Li, Kyowon Kim, Samuel H. Moseley, George Manos, Alexander Kutyrev
Publikováno v:
2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest.
We have developed a new microshutter array (MSA) subassembly. The MSA and a silicon substrate are flip-bonded together. The MSA has a new back side fabrication process to actuate the microshutters electrostatically, and the new silicon substrate has
Autor:
Dan Kelly, Mary J. Li, Vilem Mikula, Lance H. Oh, Devin E. Burns, Kyowon Kim, Alexander Kutyrev, Ari-David Brown, Samuel H. Moseley
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 16:025501
Microshutter array (MSA) subsystems were developed at NASA Goddard Space Flight Center as multiobject selectors for the Near-Infrared Spectrograph (NIRSpec) instrument on the James Webb Space Telescope (JWST). The subsystem will enable NIRSpec to sim