Through Silicon Capacitor co-integrated with TSVs on silicon interposer

Autor: Guiller, O., Joblot, S., Lamy, Y., Farcy, A., Carpentier, J.F., Defay, E.

Publikováno v: In Microelectronic Engineering 25 May 2014 120:121-126

The use of Lorentz microscopy for the determination of magnetic reversal mechanism of exchange-biased Co 30Fe 70/NiMn bilayer

Autor: Masseboeuf, A., Gatel, C., Bayle-Guillemaud, P., Lamy, Y., Viala, B.

Publikováno v: In Journal of Magnetism and Magnetic Materials 2009 321(19):3080-3083

Plasma-Assisted ALD TiN/Al2O3 stacks for MIMIM Trench Capacitor Applications

Autor: Hoogeland, D., Jinesh, K.B., Voogt, F.C., Besling, W.F.A., Lamy, Y., Roozeboom, F., Sanden, van de, M.C.M., Kessels, W.M.M., Gendt, de, S.

Publikováno v: Atomic layer deposition applications 5 : Proceedings of the 5th Symposium on Atomic Layer Deposition as part of the 216th Meeting of the Electrochemical Society 5-7 October 2009, Vienna, 389-397
STARTPAGE=389;ENDPAGE=397;TITLE=Atomic layer deposition applications 5 : Proceedings of the 5th Symposium on Atomic Layer Deposition as part of the 216th Meeting of the Electrochemical Society 5-7 October 2009, Vienna

In this paper we report on the overall plasma-assisted ALD processes of Al2O3 and TiN conducted in a single reactor chamber and at a single temperature (340 oC). The individual Al2O3 and TiN films in the stack were consecutively deposited in such a w

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2d451fbd5c032f3665938f0ed26bb10a
https://doi.org/10.1149/1.3205073

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Module intégré 3D sur silicium pour les transmissions sans fil haut-débit WiGig et WiHD à 60 GHz

Autor: El Bouayadi, O., Dussopt, L., Lamy, Y., Ferrandon, C., Joblot, S., Lacrevaz, T., Bermond, C., Fléchet, B.

Publikováno v: JNM'13
18èmes journées nationales micro-ondes
18èmes journées nationales micro-ondes, May 2013, Paris, France. pp.JNM'13

International audience; Module intégré 3D sur silicium pour les transmissions sans fil haut-débit WiGig et WiHD à 60 GHz

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::1bd896a61f5d87787b3fd2104914f818
https://hal.archives-ouvertes.fr/hal-01020903