14 MHz Micromechanical Oscillator

Autor: Mattila, Tomi, Jaakkola, Olli, Kiihamäki, Jyrki, Karttunen, Jani, Lamminmäki, Tuomas, Rantakari, Pekka, Oja, Aarne, Seppä, Heikki, Kattelus, Hannu, Tittonen, Ilkka

Publikováno v: Mattila, T, Jaakkola, O, Kiihamäki, J, Karttunen, J, Lamminmäki, T, Rantakari, P, Oja, A, Seppä, H, Kattelus, H & Tittonen, I 2001, 14 MHz Micromechanical Oscillator . in Transducers ’01 Eurosensors XV . Springer, pp. 1102-1105, 11th International Conference on Solid-State Sensors and Actuators, Transducers ’01 Eurosensors XV, Munich, Germany, 10/06/01 . https://doi.org/10.1007/978-3-642-59497-7_254

Operation of a 14 MHz micromechanical oscillator is demonstrated and analyzed. Single-crystal silicon microbridge with submicron electrode gaps is utilized as the resonator element. The oscillator shows a noise floor of −112 dBc/Hz and a near-carri

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https://cris.vtt.fi/en/publications/8b0206be-c49d-40ba-b881-d259075cd66a