Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Lam Minh Thinh"'
Autor:
Nguyen Chi Cuong, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Truong Huu Ly, Ngo Vo Ke Thanh, Le Quoc Cuong
Publikováno v:
Vietnam Journal of Science, Technology and Engineering, Vol 66, Iss 3 (2024)
This study analyses the square diaphragm structure of a micro-electro-mechanical system (MEMS) pressure sensor using the finite element method (FEM). The research investigates an enhancement in stress distribution achieved by coating a silicon (Si) d
Externí odkaz:
https://doaj.org/article/24913c14a6d144fc8273b3373f9317af
Autor:
Nguyen Chi Cuong, Trinh Xuan Thang, Lam Minh Thinh, Vuong Dinh Duy Phuc, Phan Minh Truong, Truong Huu Ly, Ngo Vo Ke Thanh, Le Quoc Cuong
Publikováno v:
Vietnam Journal of Science, Technology and Engineering, Vol 66, Iss 1 (2024)
At atmospheric pressure (p=101325 Pa), the effects of humidity and temperature on moist air become important when discussing the quality factor of micro-cantilever and micro-bridge resonators. The squeeze film damping (SFD) problem, the dominant damp
Externí odkaz:
https://doaj.org/article/52184d2cf54042e2bedfc682df4b8bee
Autor:
Nguyen Chi Cuong, Lam Minh Thinh, Phan Minh Truong, Trinh Xuan Thang, Ngo Vo Ke Thanh, Le Quoc Cuong
Publikováno v:
Vietnam Journal of Science and Technology. 59
The average modified molecular gas lubrication (MMGL) equation, which is modified with pressure flow factors and effective viscosity, is utilized to analyze the squeeze film damping (SFD) on micro-beam resonators considering effect of surface roughne
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca09ce85964c576026613ba30371091d
https://doi.org/10.15625/2525-2518/59/5/15478
https://doi.org/10.15625/2525-2518/59/5/15478