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pro vyhledávání: '"Lakshmi Rajeswara Rao Langoju"'
Publikováno v:
Computer Methods in Biomechanics and Biomedical Engineering: Imaging & Visualization. :1-17
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a1d08d825739bffa36d6ba3fbb283c34
https://doi.org/10.1080/21681163.2022.2162439
https://doi.org/10.1080/21681163.2022.2162439
Autor:
Lakshmi Rajeswara Rao Langoju, Kiruba Mangalam Subramaniam, Sundarrajan Asokan, Monoj Kumar Singha
Publikováno v:
Superlattices and Microstructures. 156:106971
In this paper, we discuss the optimal DC magnetron sputtering deposition conditions needed to obtain low resistivity Molybdenum (Mo) thin films for high-temperature (800 °C) microheater applications. The influence of Ar gas pressure (2–10 mTorr),
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3f9f0511ce335dae096986069d208bba
https://doi.org/10.1016/j.spmi.2021.106971
https://doi.org/10.1016/j.spmi.2021.106971