Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Lakshmi Narayana Pedapudi"'
Autor:
Gaurav Sultania, Lakshmi Narayana Pedapudi, Gaurav Kumar, Shashank Shrikant Agashe, Sathyanarayanan Kulasekaran
Publikováno v:
2021 3rd International Conference on Management Science and Industrial Engineering.
A semiconductor fabrication facility (Fab) manufactures huge volume of wafers and chips. To sustain high production throughput and quality, fast and accurate Fab-In inspection and verification methods are required. These methods intake a lot of spect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f42c313303d75e88d9f81a490275a01f
https://doi.org/10.1145/3460824.3460855
https://doi.org/10.1145/3460824.3460855
Autor:
Shashank Shrikant Agashe, Lakshmi Narayana Pedapudi, Taehyoung Lee, Gaurav Kumar, Avadhut Dipakrao Chaudhari, Chan Woo Park
Publikováno v:
2021 10th International Conference on Industrial Technology and Management (ICITM).
Material spectroscopy (MS) is used to identify elemental composition of micro particles. Energy dispersive X-Ray spectroscopy (EDX or EDS) is one such method. EDX analysis of defects found during wafer inspection aids in performing their root cause a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dcf98a283cc78e785adfd742274cde42
https://doi.org/10.1109/icitm52822.2021.00029
https://doi.org/10.1109/icitm52822.2021.00029