Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Lakhder, Guerbous"'
Publikováno v:
In Materials Science & Engineering B 25 June 2012 177(11):902-907
Autor:
Amer Brighet, Aissa Keffous, S. Merazga, Lakhder Guerbous, Kamel Mirouh, Mohamed Kechouane, Y. Belkacem
Publikováno v:
International Journal of Nanotechnology. 10:587
Hydrogenated amorphous silicon carbide thin films (a–SiC:H) were elaborated by DC magnetron sputtering technique by using 6H–SiC as target. The a–SiC:H films of 0.9–1.5 µm thicknesses were deposited at different temperatures of 250, 350, 450
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::02021131201b7ec965d43887aed2c2d7
https://doi.org/10.1504/ijnt.2013.053527
https://doi.org/10.1504/ijnt.2013.053527