Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Laimis Silimavicus"'
Autor:
V. Kubilius, T. Murauskas, Z. Saltyte, Adulfas Abrutis, Laimis Silimavicus, Valentina Plausinaitiene, Sabina Kuprenaite
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 32:020602
Hot-wire chemical vapor deposition (HW-CVD) was applied to grow zinc oxide (ZnO)-based transparent conducting oxide (TCO) films. Indium (In)-doped ZnO films were deposited using a cold wall pulsed liquid injection CVD system with three nichrome wires