Výsledky vyhledávání - "LIGA technique"

Mechanical characterization of microgrippers realized by LIGA technique

Autor: Laurent Robert, Skandar Basrour, D. Hauden, Sylvain Ballandras

Publikováno v: International Solid State Sensors and Actuators Conference (Transducers '97).
International Solid State Sensors and Actuators Conference (Transducers '97)., 1997, Chicago, IL, United States. pp.599-602, ⟨10.1109/SENSOR.1997.613722⟩

Metallic microgrippers, obtained by the LIGA technique, are studied. Design methods of such devices are presented and validated by the use of finite element analysis (FEA). Details on the fabrication process are also exposed. Experimental values of Y

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3a09ad3699cb3222d5c8589343fe1d6f
https://hal.archives-ouvertes.fr/hal-00008921

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A microcatalytic support realised by LIGA technique: the devil's comb

Autor: P. Mougin, William Daniau, Skandar Basrour, J. Villermaux, M. Pons, P. Bernede

Publikováno v: Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).
Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)., 1997, Chicago, IL, United States. pp.649-52, ⟨10.1109/SENSOR.1997.613735⟩

Microreactors are considered a new opportunity for R&D operations and for the production of hazardous or ultrapure materials where and when they are needed. Most chemical reactions are enhanced by a catalytic process involving a porous support for th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::8a64248424d11de74f7cc10e10f1bb2f
https://hal.archives-ouvertes.fr/hal-00008732

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LIGA technique application in micro-optics

Autor: Basrour, Skandar, Ballandras, S., Hauden, D.

Publikováno v: Annales de Physique
Annales de Physique, EDP Sciences, 1995, Vol.20, Issue 5-6, pp.693-700

The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool for mass production of high aspect ratio microstructures and microsystems. The materials used in this process are metals, polymers and also ceramics. F

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::b5b2ea5d3fbb0b42fa140fd546106589
https://hal.archives-ouvertes.fr/hal-00008925

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LIGA Beamline at ELETTRA: Conceptual Design and Technical Specifications

Autor: Chen, Qianhong H., De Bona, Francesco, Matteucci, Maurizio, Savoia, Alfredo, Zelenika, Saša

In recent years the LIGA technique permitted to extend the application of microstructure production from fields relted to electronics to fields related to micromechanics and microoptics. In the LIGA technology deep X-ray lithography constitutes the m

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=57a035e5b1ae::c635b2dfec5c90c289e1015200dbf325
https://www.bib.irb.hr/245720

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