The role of secondary electrons in electron-beam-induced-deposition spatial resolution

Autor: Pieter Kruit, Cornelis W. Hagen, L.H.A. Leunissen, N. Silvis-Cividjian

Publikováno v: Microelectronic Engineering. :693-699

Electron-beam-induced-deposition (EBID) is a versatile direct writing technique occasionally used in micro- and nanofabrication. We focus in our study on the EBID spatial resolution, defined as the lateral size of the smallest deposited structure. Th

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::55bc522682426481a78df4ee40de1ab4
https://doi.org/10.1016/s0167-9317(02)00515-4

Processing damage and electrical performance of porous dielectrics in narrow spaced interconnects

Autor: R. Jonckheere, S. Peeters, Youssef Travaly, Francesca Iacopi, Karen Maex, Herbert Struyf, L.H.A. Leunissen, Zs. Tokei, Victor Sutcliffe, O. Richard, M. Van Hove, Michele Stucchi

Publikováno v: Scopus-Elsevier

The damage induced in the low-k material upon exposure to dry etch and ash plasmas is a point of major concern in terms of preservation of the dielectric properties. There is urgent need to assess, classify and quantify the extent of such damage to a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2878f3f6cc9bef019ae194c3b1dbd325
https://doi.org/10.1557/proc-812-f1.5

Six-dimensional beam-beam kick including coupled motion

Autor: G. Ripken, Frank Schmidt, L.H.A. Leunissen

Publikováno v: Physical Review Special Topics-Accelerators and Beams, 3
Physical Review Special Topics. Accelerators and Beams, Vol 3, Iss 12, p 124002 (2000)

The six-dimensional beam-beam interaction as developed in 1992 by Hirata, Moshammer, and Ruggiero has been extended to include linear coupled motion and an arbitrary crossing plane. The technique of symplectic mapping in the six-dimensional phase spa

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::4d5eb12aaf3b686d7cd7e2f0eac9abab
http://resolver.tudelft.nl/uuid:e7b06510-388a-477e-a6ab-e12be50d4d58

Measurement of resonance driving terms from turn-by-turn data

Autor: Frank Schmidt, R. Bartolini, A. Verdier, L.H.A. Leunissen, Yannis Papaphilippou

Publikováno v: Scopus-Elsevier

It has been shown that the Fourier analysis of recorded turn-by-turn tracking data can be used to derive resonance terms of an accelerator. Besides the resonance driving terms, the non-linear one-turn map can be obtained with all non-linearities aris

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::43fc15c1fcf8c0ba1f765d495ab1f000
http://www.scopus.com/inward/record.url?eid=2-s2.0-0033330372&partnerID=MN8TOARS

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