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pro vyhledávání: '"L. Tenerz"'
Akademický článek
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Publikováno v:
Journal of Applied Physics. 70:3291-3300
The quality of vertical roughness produced by the etching of Si in aqueous KOH has been studied by varying several experimental parameters such as molarity, time of etching, temperature, and stirring. We note that at room temperature, unstirred etchi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4bd62f53e27630766bad4e6968f0afea
https://doi.org/10.1063/1.349263
https://doi.org/10.1063/1.349263
Publikováno v:
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
The authors have developed a pressure sensor in which the sensing element is only about 80 mu m wide and 1200 mu m in length, and which can therefore be mounted close to the tip of a guide wire having the desired bending flexibility and torsion stiff
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::196fbf11abcf46f6a817932be64b67a9
https://doi.org/10.1109/sensor.1991.149068
https://doi.org/10.1109/sensor.1991.149068
Publikováno v:
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176).
A surface micromachined pressure sensor for blood pressure measurements has been commercialized. Using a polysilicon surface micromachining process, a silicon chip with the dimensions of 100/spl times/150/spl times/1300 /spl mu/m and a polysilicon di
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::38bbeff79efa023780211e975d01bb12
https://doi.org/10.1109/memsys.1998.659821
https://doi.org/10.1109/memsys.1998.659821
Publikováno v:
Sensors and Actuators. 16:67-82
Despite its early discovery, doping-selective etching (DSE) of silicon sensor and actuator structures has not been widely used. The potential advantages of DSE are IC compatibility, new degrees of freedom in three-dimensional micromachining and full
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bd93e5a2bf76140261216ebcc3f608ed
https://doi.org/10.1016/0250-6874(89)80006-x
https://doi.org/10.1016/0250-6874(89)80006-x
Publikováno v:
Sensors and Actuators. 17:157-166
Fibre-optic sensors are examined from a micro-mechanical viewpoint. Theoretical expressions for the signal modulation of three basic designs are given, showing the relationship of geometrical parameters and optical transmission properties of multimod
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::204298f996921057413b1540b3e7744a
https://doi.org/10.1016/0250-6874(89)80075-7
https://doi.org/10.1016/0250-6874(89)80075-7
Publikováno v:
Sensors and Actuators. 18:389-396
A batch-fabricated non-reverse valve has been manufactured in silicon with micromachining tools, i.e., electrochemical doping-selective etching in KOH and anisotropic etching in EDP. The valve simply consists of a cantilever beam that can take two po
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bc67a85a1ebb0747e9d0cc459c238967
https://doi.org/10.1016/0250-6874(89)87044-1
https://doi.org/10.1016/0250-6874(89)87044-1
Publikováno v:
Electronics Letters. 22:615-616
A new fabrication technique for silicon microcavities is described. The technique makes use of lithographic patterning and etching techniques, high-temperature bonding between hydrated surfaces and selective etching. Cavities with dimensions 100 × 2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c704536491d39a0ff15c4223700343ed
https://doi.org/10.1049/el:19860418
https://doi.org/10.1049/el:19860418
Akademický článek
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Publikováno v:
Electronics Letters. 21:1207
Photoelectrochemical etching of silicon in hydrofluonc acid solutions is proposed as a method for realising three-dimensional sensor and actuator elements. It is shown that high selectivity in etch rates between illuminated and dark areas can be obta
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b763561d7542fe87f6aeb17814c9dcc0
https://doi.org/10.1049/el:19850851
https://doi.org/10.1049/el:19850851