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Autor:
O. Agirseven, D. T. Rivella Jr., J. E. S. Haggerty, P. O. Berry, K. Diffendaffer, A. Patterson, J. Kreb, J. S. Mangum, B. P. Gorman, J. D. Perkins, B. R. Chen, L. T. Schelhas, J. Tate
Publikováno v:
AIP Advances, Vol 10, Iss 2, Pp 025109-025109-7 (2020)
Crystalline TiO2 films of anatase, brookite, and rutile are reproducibly made from amorphous precursors deposited by RF magnetron sputtering, producing large-area, single phase films of uniform thickness. Sputtered amorphous TiO2 precursor thin films
Externí odkaz:
https://doaj.org/article/87df8f1941e94bef8551179b6eca91cf