Zobrazeno 1 - 10
of 97
pro vyhledávání: '"L. T. Perkins"'
Autor:
D. Wutte, L. Sun, Jasmina Vujic, M. D. Williams, D. S. Pickard, Y. Lee, L. T. Perkins, Ka-Ngo Leung, W.B. Kunkel, R. A. Gough
Publikováno v:
Review of Scientific Instruments. 68:1398-1402
Axial energy spread and useful beam current of positive ion beams have been carried out using a radio frequency (rf)-driven multicusp ion source. Operating the source with a 13.56 MHz induction discharge, the axial energy spread is found to be approx
Autor:
R. A. Gough, D. Wutte, Jasmina Vujic, D. S. Pickard, Alfred A. Mondelli, W.B. Kunkel, Y. Lee, M. D. Williams, L. T. Perkins, Gerhard Stengl, Ka-Ngo Leung, L. Sun
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 385:204-208
A multicusp ion source has been designed for use in ion projection lithography. Longitudinal energy spreads of the extracted positive hydrogen ion beam have been studied using a retarding field energy analyzer. It has been found that the filament-dis
Autor:
D. Wutte, M. D. Williams, Ka-Ngo Leung, R.A. Gough, D. S. Pickard, Jasmina Vujic, L. Sun, W.B. Kunkel, Y. Lee, L. T. Perkins
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 119:543-548
A compact filament-driven multicusp ion source has been studied using both hydrogen and helium. Three aspects of the source have been investigated: hydrogen ion species, axial energy spread and extractable current. An atomic ion fraction (H+) of appr
Autor:
M Hoffmann, Jasmina Vujic, Ka-Ngo Leung, M. Sarstedt, Y. Lee, M. D. Williams, L. T. Perkins, W.B. Kunkel, Marc Weber, R. A. Gough
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 374:1-6
The use of multicusp sources to generate ion beams with narrow energy spread has been investigated. It is found that the presence of a magnetic filter can reduce the longitudinal energy spread significantly. This is achieved by creating a uniform pla
Autor:
S. B. Wilde, Ka-Ngo Leung, J. P. Brainard, C. H. Draper, L. T. Perkins, R. H. Ney, M. D. Williams, E. J. T. Burns
Publikováno v:
Review of Scientific Instruments. 67:1657-1661
We have developed a new magnetic monocusp ion source for single aperture applications such as neutron generators. Coupling solenoidal magnetic fields on both sides of a monocusp magnetic field has generated over 70% atomic deuterium ions at pressures
Publikováno v:
Review of Scientific Instruments. 69:1060-1062
Heavy ion fusion (HIF) induction accelerators require ion sources that can deliver intense heavy ion beams with low emittance. The typical pulse length is 20 μs with a rise time less than 1 μs and a repetition rate of 10 Hz. So far, the surface ion
Autor:
Jasmina Vujic, H. Einenkel, L. K. Wu, R. A. Gough, Ka-Ngo Leung, M. Olivo, Y. Lee, D. S. Pickard, L. T. Perkins
Publikováno v:
Review of Scientific Instruments. 69:1023-1025
Radio-frequency (rf) driven multicusp ion sources developed at the Lawrence Berkeley National Laboratory use an internal induction coil (antenna) for plasma generation. The copper rf-antenna with a thin layer of porcelain coating, which is presently
Publikováno v:
Review of Scientific Instruments. 67:1249-1251
Multicusp ion sources are used for various applications. Presently, the implementation of this type of ion source is planned for the development of an ion beam lithography machine, which will be used for the projection of sub‐0.2 μm patterns onto
Autor:
L. T. Perkins, D. S. Pickard, G. J. de Vries, M. D. Williams, W.B. Kunkel, A.B. Wengrow, P. R. Herz, Ka-Ngo Leung
Publikováno v:
Review of Scientific Instruments. 67:1057-1059
Radio‐frequency (rf)‐driven multicusp ion sources have been developed extensively at Lawrence Berkeley National Laboratory (LBNL) for many applications, each requiring specific source designs. These uses have ranged from large ion sources for neu
Publikováno v:
Review of Scientific Instruments. 67:428-430
It has been demonstrated that pulsed and continuous wave, rf‐driven hydrogen discharges can be started with photoemission. The extracted H− current from a photoemission‐started plasma has been investigated and does not differ significantly from