Zobrazeno 1 - 3
of 3
pro vyhledávání: '"L. R. Hewitt"'
Autor:
J. H. Thomas, F. J. Tams, D. M. Hoffman, H. Gilmartin, L. R. Hewitt, A.‐M. Lanzillotto, D. J. Szostak, J. T. McGinn
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 9:456-460
An investigation was made of Pt–Ir silicide films on (100)Si prepared by deposition of submonolayer thickness of Pt followed by 20–30 A of Ir. Submonolayer coverages of Pt induce a crystalline texture approaching an epitaxial relationship between
Publikováno v:
Journal of Electronic Materials. 18:717-720
We have studied semi-insulating Fe:InP regrowth of etched mesa buried heterostruc-ture lasers by hydride vapor phase epitaxy. Type-sensitive staining and electron beam induced current photographs have shown that regions near the original etched mesa
Publikováno v:
Journal of Electronic Materials. 18:721-730
The effects of preamorphization of silicon by19F,28Si and74Ge implants preceding11B implants have been investigated in this work and compared with BF2 molecular implants. For shallow boron implanted layers less than 0.2 μm deep, the beam purity of B