Zobrazeno 1 - 3
of 3
pro vyhledávání: '"L. P. Tatum"'
Publikováno v:
2020 IEEE International Electron Devices Meeting (IEDM).
Metallic interconnect layers in a standard 65 nm CMOS back-end-of-line (BEOL) process are leveraged to form vertically oriented non-volatile (NV) nano-electromechanical (NEM) switches for compact implementation of hybrid CMOS-NEM integrated circuits.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6c9e6d9257d4b3c4ac196f2cd8ec21d3
https://doi.org/10.1109/iedm13553.2020.9372116
https://doi.org/10.1109/iedm13553.2020.9372116
Publikováno v:
Journal of Physics: Conference Series. 1052:012045
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9f86e3d1130501cf6991b1334c967721
https://doi.org/10.1088/1742-6596/1052/1/012045
https://doi.org/10.1088/1742-6596/1052/1/012045
Publikováno v:
Journal of Physics: Conference Series; 2018, Vol. 1052 Issue 1, p1-1, 1p