AlN as an actuation material for MEMS applications

Autor: Christophe Gorecki, Cathy Meunier, Alexandru Andrei, Patrick Delobelle, Laurent Hirsinger, Katarzyna Krupa, Michal Jozwik, L. Nieradko

Publikováno v: Sensors and Actuators A: Physical. 141:565-576

This paper treats a wide range of subjects related to the use of AlN as actuation layer in MEMS, from its deposition conditions to accurate interferometric device characterization and physical parameters extraction. The case of AlN driven multilayere

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::69a849b238d23176d2e91854017c5780
https://doi.org/10.1016/j.sna.2007.10.041

Level set method for microfabrication simulations

Autor: Jorge Albero, L. Nieradko, Maciej Baranski, Rafal Kasztelanic, Christophe Gorecki

Publikováno v: SPIE Proceedings.

The article describes application of Level Set method for two different microfabrication processes. First is shape evolution of during reflow of the glass structure. Investigated problem were approximated by viscous flow of material thus kinetics of

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::887f1f0edd95a2a439f72a9ac6517c3a
https://doi.org/10.1117/12.853836

Matrixes of unconventional micro-optical components molded with etched silicon

Autor: Jorge Albero, Christophe Gorecki, Birgit Päivänranta, L. Nieradko, Nicolas Passilly, Hugo Thienpont, Virginia Gomez

Publikováno v: Journal of the European Optical Society : Rapid publications
Journal of the European Optical Society : Rapid publications, European Optical Society, 2010, 5, pp.10001. ⟨10.2971/jeos.2010.10001⟩
Vrije Universiteit Brussel

This paper reports on a process to create microlenses characterized by unconventional footprints, spherical profiles and a wide range of sizes. Fabricated shapes such as squares, rectangles, ellipses, triangles and hexagons are tested alone as well a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::379aec578a7829332d70315284b58eb0
https://hal.archives-ouvertes.fr/hal-00467655

New approach of fabrication and dispensing of micromachined cesium vapor cell

Autor: Adel Douahi, Jan Dziuban, Christophe Gorecki, Vincent Giordano, L. Nieradko, Jean-Charles Beugnot, Marco Moraja

Publikováno v: JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2008, 7 (3), pp.033013. ⟨10.1117/1.2964288⟩

International audience; We describe the fabrication of wafer-scale alkali vapor cells based on silicon micromachining and anodic bonding. The principle of the proposed micromachined alkali cell is based on an extremely compact sealed vacuum cavity of

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7f752b44b3d9fe5b21ba82a425fccc9c
https://hal.archives-ouvertes.fr/hal-00362766

Fabrication of wall-coated Cs vapor cells for a chip-scale atomic clock

Autor: Christophe Gorecki, Vincent Giordano, L. Nieradko, M. Hasegawa, A. Douahi, Piotr Dziuban

Publikováno v: Proc. of IEEE/LEOS
Topical Meeting on Optical MEMS & Nanophotonics
Topical Meeting on Optical MEMS & Nanophotonics, Aug 2008, Freibourg, Germany. pp.162-163

Cesium vapor microcells incorporating a Cs dispenser were fabricated. An organosilane monolayer was successfully applied to the microcell walls as an anti-relaxation coating to improve the relaxation time of Cs atoms.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3742a30b8f088d41d79b92ba85e844cf
https://hal.archives-ouvertes.fr/hal-00347862