Zobrazeno 1 - 2
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pro vyhledávání: '"L. Leaskey"'
Autor:
T.N. Tiegs, L. Leaskey
The Cooperative Research and Development Agreement (CRADA) was directed towards development of diffusion resistant, high-purity wafer carriers for Si semiconductor production with improved properties compared to current materials. The determination o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0bccca46a52b7868afc7b7ec373b7ff9
https://doi.org/10.2172/769361
https://doi.org/10.2172/769361
The Cooperative Research and Development Agreement (CRADA) with Materials and Electrochemical Research Corp. (MER) examined materials made with different starting {alpha}/{beta}Si{sub 3}N{sub 4} ratios and with the addition of sintering aids as coati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::aecf272457ec5398783e2e5bc16bad5e
https://doi.org/10.2172/555284
https://doi.org/10.2172/555284