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Autor:
V. V. Volodko, A. G. Golovkin, L. I. Kaganov, A. M. Shterenberg, V. B. Oparin, L. M. Blinov, A. A. Razhavski, V. I. Zyn
Publikováno v:
Plasma Chemistry and Plasma Processing. 18:509-533
Time-resolved mass spectrometry was used for analysis of the plasma reactions in radio frequency (RF) SiCl 4 and SiCl 4 −O 2 discharges as functions of starting partial pressure and electrical power. Molecular concentrations of the reactants and pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17de2eb529dcf055390b91b605160005
https://doi.org/10.1023/a:1021811316740
https://doi.org/10.1023/a:1021811316740
