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Akademický článek
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Autor:
J. P. Endle, R. L. Hance, John G. Ekerdt, Sucharita Madhukar, J. M. White, Y. M. Sun, N. Nguyen
Publikováno v:
Thin Solid Films. 388:126-133
Pyrolysis and oxidation reactions of the iridium precursor, (methylcyclopentadienyl)(1,5-cyclooctadiene)iridium (I), were studied to identify the role of O 2 in chemical vapor deposition film growth. A toluene solution of (methylcyclopentadienyl)(1,5
Publikováno v:
Thin Solid Films. 376:73-81
Several commercially available organometallic precursors have been evaluated for metallorganic chemical vapor deposition (MOCVD) of pure ruthenium films. Of these, only a dimer, [RuC5H5(CO)2]2, proved suitable for CVD. On patterned Si3N4 and flat bar
Autor:
N. Mettlach, X.-M. Yan, J. P. Endle, R. L. Hance, J. M. White, John G. Ekerdt, P. D. Kirsch, Y. M. Sun, Sucharita Madhukar
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 18:10-16
We have investigated the chemistry of the iridium precursor ((methylcyclopentadienyl) (1,5-cyclooctadiene))iridium (MeCpIrCOD) and have utilized the precursor for chemical vapor deposition (CVD) of iridium films. The vapor pressure of the precursor i
Autor:
Mark H. Engelhard, S. He, R. L. Hance, Bradley M. Melnick, P. Alluri, Alan S. Lea, J. Finder, Y. Gao
Publikováno v:
Scopus-Elsevier
(Ba, Sr)TiO3 (BST) thin films have been grown on planar Ir/Si and Pt/Si substrates and on three-dimensional (3D) Ir electrodes by metalorganic chemical vapor deposition using two kinds of β-diketonate-based BST precursors. Film growth was studied as
Autor:
J. M. White, Y. M. Sun, John G. Ekerdt, Sandra R. Whaley, R. L. Hance, R. Mahaffy, K. Smith, J. P. Endle
Publikováno v:
Thin Solid Films. 346:100-107
Oxygen and substrate effects on iridium film growth have been investigated by metallorganic chemical vapor deposition (MOCVD), insitu X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), and atomic force microscopy (AFM). I
Publikováno v:
Thin Solid Films. :661-666
Free carrier concentration profiles were determined by Fourier Transform Infrared (FTIR) variable angle spectroscopic ellipsometry. The technique exploits carrier absorption in the mid-infrared spectral range and combines the sensitivity of ellipsome
Autor:
Sufi Zafar, Bradley Melnick, Paul Laberge, R. L. Hance, S.J. Gillespie, Peir Chu, Robert E. Jones, Bruce E. White, Vidya Kaushik, D. J. Taylor, Peter Zurcher
Publikováno v:
Journal of Applied Physics. 82:4469-4474
The effect of hydrogen on strontium bismuth tantalate (SrBi2Ta2O9; SBT) ferroelectric capacitors is investigated. Using several analytical techniques such as x-ray diffraction, electron diffraction, Auger electron, scanning and transmission electron
Autor:
Jürgen Grötsch, F. X. Devuyst, H. Kombrink, O.A. Abbink, T. B. van Hoof, L. Hance, K. van Ojik
Publikováno v:
71st EAGE Conference and Exhibition incorporating SPE EUROPEC 2009.
The stratigraphy of the Lower Carboniferous in the North Sea area is relatively unknown due to the deep burial and the scarcity of wells penetrating these strata, as this interval is generally considered below the petroleum fairway. In 2001, Dutch on