Zobrazeno 1 - 1
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pro vyhledávání: '"L. G. Yagola"'
Publikováno v:
Moscow University Physics Bulletin. 76:36-41
The correlation of errors for various broadband optical monitoring strategies for controlling deposition of multilayer coatings, including strategies with replaceable monitoring chips, is investigated. It is shown that it is necessary to take into ac
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3662ee58f260fc97f01de02ca1a59b83
https://doi.org/10.3103/s0027134921010070
https://doi.org/10.3103/s0027134921010070
