Characterization of 1- and 2-μm-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light

Autor: R. Schupp, L. Behnke, J. Sheil, Z. Bouza, M. Bayraktar, W. Ubachs, R. Hoekstra, O. O. Versolato

Publikováno v: Physical Review Research, Vol 3, Iss 1, p 013294 (2021)

Experimental spectroscopic studies are presented, in a 5.5–25.5 nm extreme-ultraviolet (EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin microdroplets by 5-ns-pulsed, 2-μm-wavelength laser light. Emission

Externí odkaz: https://doaj.org/article/68ecc136d37a433d8a6e988b0a935c49

Estimating survival and adoption rates of dependent juveniles

Autor: Phillip A. Street, Thomas V. Riecke, Perry J. Williams, Tessa L. Behnke, James S. Sedinger

Publikováno v: Ecology and Evolution, Vol 12, Iss 6, Pp n/a-n/a (2022)

Abstract Population growth and fitness are typically most sensitive to adult survival in long‐lived species, but variation in recruitment often explains most of the variation in fitness, as past selection has canalized adult survival. Estimating ju

Externí odkaz: https://doaj.org/article/6755b78e4e8141cdabeb2c8201e9c830

Attitudes towards abortion among medical students and gynaecologists – a qualitative study from Germany

Autor: A Baier, A-L Behnke

Publikováno v: 64. Kongress der Deutschen Gesellschaft für Gynäkologie und Geburtshilfe e. V..

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::866e07c88e9a055fbc409a57c5befddf
https://doi.org/10.1055/s-0042-1756748

Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy- and charge-state-resolved spectrometry of tin laser-produced plasma

Autor: L. Poirier, A. Bayerle, A. Lassise, F. Torretti, R. Schupp, L. Behnke, Y. Mostafa, W. Ubachs, O. O. Versolato, R. Hoekstra

Publikováno v: Poirier, L, Bayerle, A, Lassise, A, Torretti, F, Schupp, R, Behnke, L, Mostafa, Y, Ubachs, W, Versolato, O O & Hoekstra, R 2022, ' Cross-calibration of a combined electrostatic and time-of-flight analyzer for energy-and charge-state-resolved spectrometry of tin laser-produced plasma ', Applied Physics B: Lasers and Optics, vol. 128, no. 3, 39, pp. 1-11 . https://doi.org/10.1007/s00340-022-07767-1
Applied Physics B: Lasers and Optics, 128(3):39. SPRINGER
Applied Physics B: Lasers and Optics, 128(3):39, 1-11. Springer Verlag

We present the results of the calibration of a channeltron-based electrostatic analyzer operating in time-of-flight mode (ESA-ToF) using tin ions resulting from laser-produced plasma, over a wide range of charge states and energies. Specifically, the

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::bdebc79410872108b7392a7d5b9f3646
https://doi.org/10.1007/s00340-022-07767-1

The spectrum of a 1- μ m-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5-265.5 nm wavelength range

Autor: Z. Bouza, J. Byers, J. Scheers, R. Schupp, Y. Mostafa, L. Behnke, Z. Mazzotta, J. Sheil, W. Ubachs, R. Hoekstra, M. Bayraktar, O. O. Versolato

Publikováno v: AIP Advances, 11(12):125003, 1-8. American Institute of Physics
Bouza, Z, Byers, J, Scheers, J, Schupp, R, Mostafa, Y, Behnke, L, Mazzotta, Z, Sheil, J, Ubachs, W, Hoekstra, R, Bayraktar, M & Versolato, O O 2021, ' The spectrum of a 1-μ m-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5-265.5 nm wavelength range ', AIP Advances, vol. 11, no. 12, 125003, pp. 1-8 . https://doi.org/10.1063/5.0073839
AIP advances, 11(12):125003. American Institute of Physics
AIP Advances, Vol 11, Iss 12, Pp 125003-125003-8 (2021)
AIP Advances, 11(12):125003. ROYAL SOC CHEMISTRY

We present a calibrated spectrum in the 5.5-265.5 nm range from a microdroplet-tin Nd:YAG-laser-produced plasma under conditions relevant for the production of extreme ultraviolet (EUV) light at 13.5 nm for nanolithography. The plasma emission spectr

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1c87fdb6b34a4e4050155bf6c0b63a8f
https://research.rug.nl/en/publications/665d211c-fb93-4215-9991-9b6edffed028