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pro vyhledávání: '"L. Autryve"'
Autor:
L. Haspeslagh, D. Maes, Ludovic Goux, Dirk Wouters, Judit Lisoni, M. Schwitters, P. Casella, L. Autryve, Vasile Paraschiv, G. Russo, R. Zambrano, G. Corallo, C. Artoni, J.-L. Everaert, C. Caputa, H. Monchoix
Publikováno v:
Integrated Ferroelectrics. 66:71-83
This paper reports on the integration of MOCVD SBT based stacked ferroelectric capacitors in a 0.35 μ m CMOS technology for embedded FeRAM, using a ferroelectric capacitor (FeCap) that is scalable to a 3D configuration. The electrical parameters of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc4578c3a01c9f4534a4d8bbbe2e3e4b
https://doi.org/10.1080/10584580490894753
https://doi.org/10.1080/10584580490894753
