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Autor:
N M Zarjankin, E.S. Kochurina, S.A. Anchutin, V.V. Kalugin, A.S. Timoshenkov, L R Boev, S.P. Timoshenkov
Publikováno v:
Nano- i Mikrosistemnaya Tehnika. 23:63-67
Currently, MEMS accelerometers are one of the most promising areas in the inertial sensor industry. The design and study of MEMS accelerometers structures is associated with solving problems of mathematical physics. Also, a very important task is to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8a761d30aa49cbc6dc808649bc5392d3
https://doi.org/10.17587/nmst.23.63-67
https://doi.org/10.17587/nmst.23.63-67
