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Autor:
Lötters, Shirin Azadi Kenari, Remco J. Wiegerink, Henk-Willem Veltkamp, Remco G. P. Sanders, Joost C.
Publikováno v:
Micromachines; Volume 14; Issue 7; Pages: 1280
This paper presents a novel gas-independent thermal flow sensor chip featuring three calorimetric flow sensors for measuring flow profile and direction within a tube, along with a single-wire flow independent thermal conductivity sensor capable of id