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pro vyhledávání: '"Kzuya Saito"'
Autor:
Masahiro Hirata, Kzuya Saito, Kiyohide Kokubun, Yoshinao Ikeda, Sonoko Tsukahara, Shingo Ichimura
Publikováno v:
Vacuum. 53:291-294
The construction of a new vacuum system fabricated for pressure calibration in UHV/XHV region is explained together with the measurement of outgassing rate from an XHV chamber used in the system. The outgassing rate was measured using a test chamber
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::77e55ccca9182f7cb853bb71c2992abb
https://doi.org/10.1016/s0042-207x(98)00373-x
https://doi.org/10.1016/s0042-207x(98)00373-x
