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pro vyhledávání: '"Kyung-Yoon Bang"'
Publikováno v:
Bulletin of the Korean Chemical Society. 26:947-951
Rotating compensator multichannel spectroscopic ellipsometry has been employed to determine the optical functions of various liquids used in chemistry. We attempted three different measurement configurations: (1) air-liquid interface, (2) prism-liqui
Publikováno v:
Japanese Journal of Applied Physics. 41:3978-3980
Rotating-polarizer-and-analyzer-ellipsometry was developed with a multichannel detector. In this system, the transmission axes of the polarizer and analyzer rotated in phase using a flexible shaft for mechanical connection. With this configuration, a
Autor:
Hyoung-Hee Kim, Seung-Wook Park, Kyung-Yoon Bang, Young-Keun Kwon, Hye-Keun Oh, Ilsin An, Kun-Sang Lee
Publikováno v:
Advances in Resist Technology and Processing XX.
It is important that more accurate process parameters are extracted to predict the results of each process by simulation. It is well known that both refractive index and absorption coefficient of photoresist (PR) are varied when the thickness of PR i