Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kyu-Se Choi"'
Autor:
Wonseop Choi, Kyu-Se Choi, Zhan Chen, Seung-Mahn Lee, Rajiv K. Singh, G. Bahar Basim, Brij M. Moudgil
Publikováno v:
MRS Bulletin. 27:752-760
The formulation of slurries for chemical–mechanical planarization (CMP) is currently considered more of an art than a science, due to the lack of understanding of the wafer, slurry, and pad interactions involved. Several factors, including the larg
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::163aa4b060f8601a58257d166fdc38c9
https://doi.org/10.1557/mrs2002.245
https://doi.org/10.1557/mrs2002.245
Autor:
Singh, Rajiv K., Lee, Seung-Mahn, Choi, Kyu-Se, Bahar Basim, G., Choi, Wonseop, Chen, Zhan, Moudgil, Brij M.
Publikováno v:
MRS Bulletin; Oct2002, Vol. 27 Issue 10, p752-760, 9p