Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kyu-Hong Lim"'
Autor:
Yong-Wan Kim, Kye-Weon Kim, Kyu-Hong Lim, Sang-Mun Chon, Sun-Yong Choi, Chung-sam Jun, Sang-Bong Choi
Publikováno v:
2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).
We have developed an automated contact inspection system using an in-line CD SEM and applied it to monitor contact etching processes. As the design rule shrinks, monitoring of the contact etching, which cannot be detected by the conventional optical
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::14c5f3c200a604329c1e35c2b130fea1
https://doi.org/10.1109/issm.2001.962999
https://doi.org/10.1109/issm.2001.962999
Autor:
Sang-Mun Chon, Sang-Bong Choi, Yong-Wan Kim, Kye-Weon Kim, Kyu-Hong Lim, Sun-Yong Choi, Chung-Sam Jun
Publikováno v:
2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203); 2001, p399-401, 3p