Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kyong Taik Lee"'
Publikováno v:
Journal of the Korean Physical Society. 73:1329-1333
We investigated the mechanism of mobility enhancement after the dehydrogenation process in polycrystalline silicon (poly-Si) thin films. The dehydrogenation process was performed by using an in-situ CVD chamber in a N2 ambient or an ex-situ furnace i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d01372fa3980dd2b9ed6bb336d6ea9a8
https://doi.org/10.3938/jkps.73.1329
https://doi.org/10.3938/jkps.73.1329
Publikováno v:
Journal of the Korean institute of surface engineering. 47:181-185
We investigated the structural, electrical and optical characteristics of IGZO thin films deposited by a roomtemperature RF reactive magnetron sputtering. The thin films deposited were annealed for 2 hours at various temperatures of 300, 400, 500 and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e575f3fb6b85e7db8731918b7ccf6d6
https://doi.org/10.5695/jkise.2014.47.4.181
https://doi.org/10.5695/jkise.2014.47.4.181