Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Kyong Sub Kim"'
Publikováno v:
New Physics: Sae Mulli. 61:605-609
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7588e75ed47f9bd040aed52e53fbdd40
https://doi.org/10.3938/npsm.61.605
https://doi.org/10.3938/npsm.61.605
Autor:
Zhong-Tao Jiang, Han Wook Song, Kwangsoo No, Yon Ho Jeong, Byoung Gon Yu, Kyong Sub Kim, Joon Sung Lee
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 15:72-76
The decomposition and the degradation characteristics of Ba(TMHD)2 and Sr(TMHD)2 with storage time were analyzed using differential scanning calorimetry. Mass spectrometer monitoring of source vapors with Ar and NH3 carrier gases in an electron cyclo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::19c7636794cb585a776b3d138bbc175d
https://doi.org/10.1116/1.580479
https://doi.org/10.1116/1.580479
Autor:
Seungbum Hong, Young-Bum Koh, Kyong-Sub Kim, Sang-Gyun Woo, Eunah Kim, Zhong-Tao Jiang, Dae Weon Kim, Sung-Chul Lim, Kwangsoo No
Publikováno v:
Applied optics. 36(28)
To acquire the required resolution for 248- and 193-nm lithography, a study of attenuated phase-shifting mask (Att-PSM) technology is in progress. We performed a simulation study using a matrix method to calculate relative transmittance and the amoun
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cfb1a801a7d84b222e3fad44d5ec869f
https://pubmed.ncbi.nlm.nih.gov/18264234
https://pubmed.ncbi.nlm.nih.gov/18264234
Autor:
Byeong-Soo Bae, Joon-Sung Lee, Young-Bum Koh, Dong-wan Kim, Hoyoung Kang, Sang Soo Han, Zhong-Tao Jiang, Byung-Hyuk Jun, Kwangsoo No, Kyong-Sub Kim
Publikováno v:
Applied optics. 36(7)
Titanium oxide thin film, fabricated with tetraisopropyltitanate and oxygen by electron cyclotron resonance-plasma-enhanced chemical vapor deposition, is investigated as a potential candidate for the antireflective layer in KrF excimer laser (248-nm)
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d7f2044e0973d4cfc97c3e494d600567
https://pubmed.ncbi.nlm.nih.gov/18250825
https://pubmed.ncbi.nlm.nih.gov/18250825