Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kwen Woo Han"'
Autor:
Jin Woo Seo, Eun Su Park, Wan Hee Lim, Yoong Hee Na, Hui Chan Yoon, Jin Hee Bae, Bo Sun Kim, Cho Youn-Jin, Jun Young Jang, Kwen Woo Han
Publikováno v:
SPIE Proceedings.
Spin-on dielectric (SOD) is widely used in semiconductor industry, to form insulating layers including shallow trench isolation (STI) or inter-layer dielectrics (ILD). SOD has several advantages over high density plasma chemical vapor deposition (HDP
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76f416cc77b9f321cc5c98167775ebd9
https://doi.org/10.1117/12.2046098
https://doi.org/10.1117/12.2046098
Autor:
Goeun Kim, Sang-Kyun Kim, Sang Hak Lim, Hui Chan Yoon, Kwen Woo Han, Hyun-Ji Song, Miyoung Kim, Eun Su Park
Publikováno v:
SPIE Proceedings.
In the recent semiconductor industry, as the device shrinks, spin-on dielectric (SOD) has been adopted as a widely used material because of its excellent gap-fill, efficient throughput on mass production and highly competitive initial cost of ownersh
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d1dab7140900dd19146a8f2cfdf481b5
https://doi.org/10.1117/12.916252
https://doi.org/10.1117/12.916252