Zobrazeno 1 - 7
of 7
pro vyhledávání: '"Kwang-Seok Hwang"'
Publikováno v:
The Korean Data Analysis Society. 21:859-875
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e13078885389f34949a39de5255707b5
https://doi.org/10.37727/jkdas.2019.21.2.859
https://doi.org/10.37727/jkdas.2019.21.2.859
Autor:
Jin Won Lee1 jwlee@postech.ac.kr, Kwang-Seok Hwang1, Ki-Hyun Lee1, Min-Young Yi2, Mi-Jeong Lee3
Publikováno v:
Journal of Adhesion Science & Technology. 2009, Vol. 23 Issue 5, p769-777. 9p. 7 Diagrams.
Publikováno v:
Journal of Adhesion Science and Technology. 26:1419-1427
Cryogenic particle beam is an effective means of removing nano-sized contaminant particles from a substrate. Based on the previous finding that a smaller bullet size and a higher velocity are more effective for removing contaminant particles with a h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a22b0cdba0e651becf4034a63ede096a
https://doi.org/10.1163/156856111x618290
https://doi.org/10.1163/156856111x618290
Publikováno v:
Thin Solid Films. 517:3866-3869
Cryogenic particle beam is an effective means of removing nano-sized contaminant particles from a substrate. To overcome the current cleaning limit of 50 nm, a particle beam with novel properties – smaller bullet size moving at a higher velocity
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::044f225711a4f8aa2972c7c557bcd00c
https://doi.org/10.1016/j.tsf.2009.01.132
https://doi.org/10.1016/j.tsf.2009.01.132
Publikováno v:
Nanoscale Research Letters
NANOSCALE RESEARCH LETTERS(7)
NANOSCALE RESEARCH LETTERS(7)
Removal of nanometer-sized contaminant particles (CPs) from substrates is essential in successful fabrication of nanoscale devices. The particle beam technique that uses nanometer-sized bullet particles (BPs) moving at supersonic velocity was improve
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::42ca36e88320760fc6a3bd9188f3a152
https://pubmed.ncbi.nlm.nih.gov/22494621
https://pubmed.ncbi.nlm.nih.gov/22494621
Publikováno v:
ECS Meeting Abstracts. :117-117
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::81908045f3e185c0c06dfe7999c8bcf2
https://doi.org/10.1149/ma2010-01/2/117
https://doi.org/10.1149/ma2010-01/2/117
Publikováno v:
ECS Meeting Abstracts. :95-95
not Available.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::157751b3f06c52a532a8fd4b44bd1929
https://doi.org/10.1149/ma2009-01/2/95
https://doi.org/10.1149/ma2009-01/2/95