Zobrazeno 1 - 2
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pro vyhledávání: '"Kwang Bong Lee"'
Publikováno v:
Solid State Phenomena. 255:387-389
The existing methodology for Front Opening Unified Pod (FOUP) cleaning, storage, and transfer is inherently flawed in three areas: a) equipment layout, b) intra-process wait time, and c) human handling. In each area, improved solutions are suggested
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d8885d45c7dae82e4baff4736169dc33
https://doi.org/10.4028/www.scientific.net/ssp.255.387
https://doi.org/10.4028/www.scientific.net/ssp.255.387
Autor:
Kwang-Bong Lee, Chang-Soo Lee
Publikováno v:
INTERNATIONAL BUSINESS REVIEW. 3:91
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::17adf2c13f912c6000bcec419ff986ce
https://doi.org/10.21739/ibr.1999.12.3.1.91
https://doi.org/10.21739/ibr.1999.12.3.1.91