Výsledky vyhledávání - "Kurtis Leschkies"

(Invited) Supercritical Drying: A Sustainable Solution to Pattern Collapse of High-Aspect-Ratio and Low-Mechanical-Strength Device Structures

Autor: Robert Jan Visser, Chen Han-Wen, Kurtis Leschkies, Roman Gouk, Nikos Bekiaris, Steven Verhaverbeke, Shiyu Sun

Publikováno v: ECS Transactions. 69:119-130

Collapse of nanostructures with high aspect ratio (STI, 3D NAND, capacitor, FinFET, etc.) and/or low mechanical strength (ultra low-k trench, EUV resist pattern, etc.) during drying step in wet process has become a critical issue in semiconductor ind

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::faf5e67a56e74a829c80b9ce957a55c7
https://doi.org/10.1149/06908.0119ecst

Zobrazit plný text záznamu

Development of an All-Wet-Etch Process Chemistry for the Patterning of Metal Conductors in Igzo Thin-Film-Transistors

Autor: R. Lim, Kurtis Leschkies, Robert Jan Visser, Hyun-Ku Kim, Dong-Kil Yim, Steven Verhaverbeke, H. C. Hsu, John M. White

Publikováno v: ECS Transactions. 58:287-297

Here, we discuss the development of an all-wet back-channel etch process chemistry with high metal selectivity that is capable of shaping the structures of an IGZO TFT to customer specifications. Our approach involves a two-step etching process that

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1c8b5c9c1edd53567ebc618ab313a631
https://doi.org/10.1149/05807.0287ecst

Zobrazit plný text záznamu

Novel Texture Etch Chemistry for Transparent Conducting Oxides Used in Photovoltaic Cells

Autor: Roman Gouk, Steven Verhaverbeke, Robert Jan Visser, Kurtis Leschkies

Publikováno v: Solid State Phenomena. 187:329-332

In thin film photovoltaic silicon stacks, the sun facing contact needs to be transparent and textured. Typically transparent metal oxides are used for this purpose. When using sputtered ZnO as the transparent conducting contact typically an acid etch

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0c531395b9209266f5718c53b9ffcf9a
https://doi.org/10.4028/www.scientific.net/ssp.187.329

Zobrazit plný text záznamu

Facile synthesis of bimetallic Ag/Ni core/sheath nanowires and their magnetic and electrical properties

Autor: Jie Zeng, Maureen McKiernan, Steven Verhaverbeke, Miao Jin, Alejandro L. Briseno, Christopher Lazik, Kurtis Leschkies, Younan Xia, Sunzida Ferdous, Roman Gouk

Publikováno v: Small (Weinheim an der Bergstrasse, Germany). 6(17)

T his paper describes a facile method for coating Ag nanowires with uniform, ferromagnetic sheaths made of polycrystalline Ni. A typical sample of these core/sheath nanowires had a saturation magnetization around 33 emu g − 1 . We also demonstrated

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d5a8f145124b52be65035c2393591877
https://pubmed.ncbi.nlm.nih.gov/20677185

Zobrazit plný text záznamu