Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Kuo-Yun Wang"'
Publikováno v:
Semiconductor Manufacturing Technology Workshop, 2002.
The control factors in controlling ultra-thin oxide measurement error on ellipsometry have been identified. In this work, we investigated some aspects of precision and accuracy, as applied to ellipsometry. A typical method was applied to take a routi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f0532f2803b3e6a4903060df376636ec
https://doi.org/10.1109/smtw.2002.1197439
https://doi.org/10.1109/smtw.2002.1197439
Publikováno v:
Semiconductor Manufacturing Technology Workshop, 2002; 2002, p251-255, 5p