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pro vyhledávání: '"Kuo-Tai Teng"'
Autor:
Paolo Alagna, Kuo-Tai Teng, Omar Zurita, Will Conley, Sam Liu, Josh Thornes, Stephen Hsu, Xiang-ru Xu
Publikováno v:
Optical Microlithography XXXIII.
Over the years, lithography engineers have continued to focus on CD control, overlay and process capability to meet node requirements for yield and device performance. The use of ArFi lithography for advanced process nodes demands challenging pattern
Autor:
Kuo-Tai Teng, Tsu-Chin Tsao
Publikováno v:
ACC
The learning filter in Iterative Learning Control determines the performance in terms of convergence rate and converged error. The ideal learning filter is the inverse of the system being learned. For minimum phase system, direct system inversion can
Publikováno v:
2012 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM).
This paper investigates target tracking control for a high intensity focused ultrasound (HIFU) transducer to follow liver motion induced by respiratory cycles. Motivated by the apparent respiratory cycles repetitive control is first considered. Adapt