Zobrazeno 1 - 1
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pro vyhledávání: '"Kuo-Hong Yeh"'
Publikováno v:
Coatings; Volume 12; Issue 6; Pages: 811
WSiN films were produced through hybrid pulse direct current/radio frequency magnetron co-sputtering and evaluated as diffusion barriers for Cu metallization. The Cu/WSiN/Si assemblies were annealed for 1 h in a vacuum at 500–900 °C. The structura
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::55dd7da91f0d4f781a9b3d02107b5d4d
