Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Kunitoshi Nishimura"'
Publikováno v:
Precision Engineering. 36:270-280
In this paper, a three-point method with an autonomous calibration function is proposed to measure the flatness of next-generation 450 mm wafers. The measuring method is comprised of the following two processes: (1) the measurement of the flatness of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ec5ad87e913fabb66f5700fd73d52f99
https://doi.org/10.1016/j.precisioneng.2011.11.001
https://doi.org/10.1016/j.precisioneng.2011.11.001
Publikováno v:
Precision Engineering. 35:153-163
An autonomous method to calibrate the zero-difference for the three-point method of measuring surface straightness is proposed. A simple cone-disc, which can be made by a CNC turning machine, is used for the calibration. The calibration method is com
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7722e75a6e38b69819b6e55c95cbf3ac
https://doi.org/10.1016/j.precisioneng.2010.09.007
https://doi.org/10.1016/j.precisioneng.2010.09.007
Autor:
Yuuji Takeda, Kunitoshi Nishimura
Publikováno v:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 58:3063-3068
When an object is pressed by a spring and fixed with friction force, microslippage often occurs because of an external force lower than the predictable value. This is because the object is pressed not only by the normal force but also by the tangenti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::bb7cc2706b3d083331a8631c57a42411
https://doi.org/10.1299/kikaic.58.3063
https://doi.org/10.1299/kikaic.58.3063
Autor:
Kunitoshi Nishimura
Publikováno v:
Review of Scientific Instruments. 62:2004-2007
A micropositioner consisting of flexure pivoted levers with a displacement amplifying mode to enhance displacement sensor sensitivity and a displacement reducing mode to achieve high resolution is described. The micropositioner is actuated by a piezo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::51c167d4949cf8d0209c52664c139369
https://doi.org/10.1063/1.1142526
https://doi.org/10.1063/1.1142526
Publikováno v:
Measurement Science and Technology. 23:115102
In this paper, the relationship between the uncertainty components of displacement sensors and the measurement uncertainty of a surface straightness measurement system with the three-point method is analytically studied. The uncertainty components in
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9a9d8284f3abf952743a0b3b29103296
https://doi.org/10.1088/0957-0233/23/11/115102
https://doi.org/10.1088/0957-0233/23/11/115102
Publikováno v:
Applied Optics. 51:4754
An autonomous method for calibrating the reference flat surface of an interferometer is proposed with the uncertainty analysis. The method consists of three phases; the first step is multiple rotating shifts of a specimen, the second is a linear shif
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::92a1928c746542ba72ebd09f2029a268
https://doi.org/10.1364/ao.51.004754
https://doi.org/10.1364/ao.51.004754
Publikováno v:
Measurement Science and Technology. 22:125201
An autonomous method for calibrating the zero difference for the three-point method of surface straightness measurement is presented and discussed with respect to the relationship between the measurement uncertainty and the size of the disk gauge use
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3b6d952408cb1e66e33335ef1630ce6d
https://doi.org/10.1088/0957-0233/22/12/125201
https://doi.org/10.1088/0957-0233/22/12/125201
Autor:
Kunitoshi NISHIMURA
Publikováno v:
TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series C. 45:47-56
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9903f411cc425ccddc1ccbb88154e5b8
https://doi.org/10.1299/kikaic.45.47
https://doi.org/10.1299/kikaic.45.47
Autor:
Kunitoshi Nishimura
Publikováno v:
Transactions of the Japan Society of Mechanical Engineers. 42:153-160
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::811d0286e39889255bea89ce6420ef2f
https://doi.org/10.1299/kikai1938.42.153
https://doi.org/10.1299/kikai1938.42.153
Autor:
Kunitoshi Nishimura
Publikováno v:
Journal of the Japan Society for Precision Engineering. 54:1369-1374
A small, precise and fast positioning stage is indispensable for assembly of small parts, i.e. laser transmitter modules and optical fiber connectors. Conventional stages using roller bearings or ball bearings are too massive with respect to the asse
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::56392cc7b3b76e198bca218d550e93f4
https://doi.org/10.2493/jjspe.54.1369
https://doi.org/10.2493/jjspe.54.1369